Rudrappa, Deepu Bagur and Venkatramana, Venu Bhat and Ahmed, Saleem and Sharma, Avnish and Purakkat, Savitha and Basavaiah, Basavaraju Yeriyur (2022) A Simple Method for Fabrication of Self-sharpened Silicon Tips for Atomic Force Microscopy Applications. Crystal Research and Technology, 57 (6). ISSN 1521-4079
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A simple and high yield method is presented for the bulk generation of atomic force microscopy (AFM) probes with self-sharpened silicon tips. The experimental setup includes a controlled chemical etching environment at a constant temperature with continuous recirculation and filtration. A KOH solution is considered cost-effective as the etchant and stabilized to the required concentration (55%, v/v) and temperature (40 degrees C), so as to provide an etch rate of 40 nm min(-1) and yield a smooth etch profile. A high density of silicon tips is fabricated, with yield up to 90%, and a consistent tip radius of approximate to 12.73 +/- 1.51 nm. These tips can be successfully integrated with AFM cantilevers, resulting in AFM probes. Further, such AFM-probes are well characterized using laser Doppler vibrometry and scanning electron microscopy. The result shows a resonance frequency of 1.2-1.4 MHz and a high-quality factor of approximate to 708.8. In addition, the AFM probes produced images are comparable in quality to those obtained from commercially available probes.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | atomic force microscopy; laser doppler vibrometry; micromachining; oxidative sharpening; self-sharpening |
| Subjects: | C Chemical Science > Chemistry |
| Divisions: | Department of > Chemistry |
| Depositing User: | C Swapna Library Assistant |
| Date Deposited: | 01 Aug 2023 09:57 |
| Last Modified: | 01 Aug 2023 09:57 |
| URI: | http://eprints.uni-mysore.ac.in/id/eprint/17680 |
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